JPS6322740U - - Google Patents
Info
- Publication number
- JPS6322740U JPS6322740U JP11652986U JP11652986U JPS6322740U JP S6322740 U JPS6322740 U JP S6322740U JP 11652986 U JP11652986 U JP 11652986U JP 11652986 U JP11652986 U JP 11652986U JP S6322740 U JPS6322740 U JP S6322740U
- Authority
- JP
- Japan
- Prior art keywords
- slider
- guide rail
- semiconductor wafer
- cassette
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11652986U JPS6322740U (en]) | 1986-07-28 | 1986-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11652986U JPS6322740U (en]) | 1986-07-28 | 1986-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322740U true JPS6322740U (en]) | 1988-02-15 |
Family
ID=31001206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11652986U Pending JPS6322740U (en]) | 1986-07-28 | 1986-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322740U (en]) |
-
1986
- 1986-07-28 JP JP11652986U patent/JPS6322740U/ja active Pending
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